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previously published November 2004
such as pellets of perfluoroalkoxy (PFA)
SEMI D21-0706 (Reapproved 0815)
but the nature of the apparatus is significantly different to accommodate the bricks and ingots
The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded)
G08400 - SEMI G84 - Specification for Strip Map Protocol StdTpc-3DS-IC previously published November 2004The purpose of this specification is to provide definition that will enable the implementation of strip mapping throughout the assembly and test process. This document will enable standardization of the strip map format and execution method throughout the factory floor. This document describes the format and methods in which strip map information shall be formatted and used to transfer information about a strip to and from equipment using the SECS GEM